Issued Patents 2018
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10147620 | Bolted wafer chuck thermal management systems and methods for wafer processing systems | David Benjaminson, Dmitry Lubomirsky, Ananda Seelavanth Math, Saravanakumar Natarajan | 2018-12-04 |