Issued Patents 2018
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10147620 | Bolted wafer chuck thermal management systems and methods for wafer processing systems | David Benjaminson, Dmitry Lubomirsky, Saravanakumar Natarajan, Shubham Chourey | 2018-12-04 |
AM
Ananda Seelavanth Math
Overall (2018): #486,453 of 503,207Top 100%
1
Patents 2018