Issued Patents 2018
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10147620 | Bolted wafer chuck thermal management systems and methods for wafer processing systems | David Benjaminson, Dmitry Lubomirsky, Ananda Seelavanth Math, Shubham Chourey | 2018-12-04 |
SN
Saravanakumar Natarajan
Overall (2018): #249,935 of 503,207Top 50%
1
Patents 2018