Issued Patents 2017
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9793268 | Method and structure for gap filling improvement | Ying-Hao Su, Yu-Chung Su, Yu-Lun Liu, Chi-Kang Chang, Chia-Chu Liu | 2017-10-17 |
| 9786569 | Overlay measurement and compensation in semiconductor fabrication | Wei-De Ho, Shu-Hong Lin, Ya Hui Chang, Chih-Jung Chiang, Chang-Yi Tsai +1 more | 2017-10-10 |
| 9773671 | Material composition and process for mitigating assist feature pattern transfer | Meng CHEN, Chen-Hau Wu, Meng-Wei Chen, Yu-Chin Huang, Li-Hsiang Lai +2 more | 2017-09-26 |
| 9748107 | Method for removing semiconductor fins using alternating masks | Tzu-Chun Lo, Min Cheng, Hsiao-Wei Su, Jeng-Shiun Ho, Ching-Che Tsai +3 more | 2017-08-29 |
| 9684236 | Method of patterning a film layer | Ken-Hsien Hsieh, Kuan-Hsin Lo, Shih-Ming Chang, Wei-Liang Lin, Joy Cheng +5 more | 2017-06-20 |
| 9607835 | Semiconductor device with biased feature | Chia-Chu Liu, Min-Chang Liang, Mu-Chi Chiang | 2017-03-28 |
| 9543161 | Method of planarizating film | Ying-Hao Su, Yu-Lun Liu, Chi-Kang Chang, Shih-Chi Fu, Chloe Hsu | 2017-01-10 |