Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9773671 | Material composition and process for mitigating assist feature pattern transfer | Meng CHEN, Meng-Wei Chen, Kuei-Shun Chen, Yu-Chin Huang, Li-Hsiang Lai +2 more | 2017-09-26 |
| 9581908 | Photoresist and method | Wei-Han Lai, Ching-Yu Chang | 2017-02-28 |