Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9810990 | Chemical treatment for lithography improvement in a negative tone development process | Ching-Yu Chang, Cheng-Han Wu, Siao-Shan Wang, Chin-Hsiang Lin | 2017-11-07 |
| 9581908 | Photoresist and method | Chen-Hau Wu, Ching-Yu Chang | 2017-02-28 |