Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9810990 | Chemical treatment for lithography improvement in a negative tone development process | Wei-Han Lai, Ching-Yu Chang, Cheng-Han Wu, Chin-Hsiang Lin | 2017-11-07 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9810990 | Chemical treatment for lithography improvement in a negative tone development process | Wei-Han Lai, Ching-Yu Chang, Cheng-Han Wu, Chin-Hsiang Lin | 2017-11-07 |