Issued Patents 2017
Showing 1–25 of 25 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9851636 | Materials and methods for improved photoresist performance | Chen-Yu Liu | 2017-12-26 |
| 9810990 | Chemical treatment for lithography improvement in a negative tone development process | Wei-Han Lai, Cheng-Han Wu, Siao-Shan Wang, Chin-Hsiang Lin | 2017-11-07 |
| 9772559 | Patterned photoresist removal | Ya-Ling Cheng, Chien-Chih Chen | 2017-09-26 |
| 9768022 | Advanced cross-linkable layer over a substrate | Ming-Huei Weng, Chen-Yu Liu | 2017-09-19 |
| 9761449 | Gap filling materials and methods | Yu-Chung Su | 2017-09-12 |
| 9731231 | Laminar flow intake channeling device | Ya-Ling Cheng | 2017-08-15 |
| 9735047 | Semiconductor device and method for fabricating the same | Ssu-I Fu, Yu-Hsiang Hung, Chih-Kai Hsu, Wei-Chi Cheng, Jyh-Shyang Jenq | 2017-08-15 |
| 9728469 | Methods for forming a stress-relieved film stack by applying cutting patterns | Wen-Yun Wang | 2017-08-08 |
| 9704711 | Silicon-based middle layer composition | Chen-Yu Liu | 2017-07-11 |
| 9696634 | Immersion lithography system using a sealed wafer bath | Burn Jeng Lin | 2017-07-04 |
| 9684236 | Method of patterning a film layer | Ken-Hsien Hsieh, Kuan-Hsin Lo, Shih-Ming Chang, Wei-Liang Lin, Joy Cheng +5 more | 2017-06-20 |
| 9678422 | Photoacid generator bound to floating additive polymer | Chen-Yu Liu | 2017-06-13 |
| 9665004 | Photosensitive material and method of lithography | — | 2017-05-30 |
| 9645497 | Lithography patterning technique | Lilin Chang | 2017-05-09 |
| 9643176 | Channel mixer | Shu-Hsien Liao | 2017-05-09 |
| 9627268 | Method for fabricating semiconductor device | Li-Wei Feng, Shih-Hung Tsai, Ssu-I Fu, Jyh-Shyang Jenq, Chien-Ting Lin +4 more | 2017-04-18 |
| 9612536 | Developer for lithography | Chen-Yu Liu | 2017-04-04 |
| 9599896 | Photoresist system and method | Chien-Chih Chen, Cheng-Han Wu | 2017-03-21 |
| 9595440 | Method of using a vaporizing spray system to perform a trimming process | Kuei-Liang Lu, Ming-Feng Shieh | 2017-03-14 |
| 9580672 | Cleaning composition and method for semiconductor device fabrication | Chen-Yu Liu | 2017-02-28 |
| 9581908 | Photoresist and method | Chen-Hau Wu, Wei-Han Lai | 2017-02-28 |
| 9570285 | Cleaning composition and methods thereof | Chen-Yu Liu | 2017-02-14 |
| 9543159 | Patterning process of a semiconductor structure with a wet strippable middle layer | Chien-Chih Chen, Chia-Wei Chen, Shao-Jyun Wu | 2017-01-10 |
| 9543160 | Reducing defects in patterning processes | — | 2017-01-10 |
| 9543147 | Photoresist and method of manufacture | Chen-Yu Liu, Chien-Chih Chen, Yen-Hao Chen | 2017-01-10 |