Issued Patents 2017
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9810994 | Systems and methods for high-throughput and small-footprint scanning exposure for lithography | Shy-Jay Lin, Jaw-Jung Shin, Wen-Chuan Wang | 2017-11-07 |
| 9696634 | Immersion lithography system using a sealed wafer bath | Ching-Yu Chang | 2017-07-04 |
| 9678434 | Grid refinement method | Wen-Chuan Wang, Jaw-Jung Shin, Pei-Yi Liu, Shy-Jay Lin | 2017-06-13 |
| 9594862 | Method of fabricating an integrated circuit with non-printable dummy features | Jyuh-Fuh Lin, Cheng-Hung Chen, Pei-Yi Liu, Wen-Chuan Wang, Shy-Jay Lin | 2017-03-14 |
| 9552964 | Method of fabricating an integrated circuit with a pattern density-outlier-treatment for optimized pattern density uniformity | Jyuh-Fuh Lin, Cheng-Hung Chen, Pei-Yi Liu, Wen-Chuan Wang, Shy-Jay Lin | 2017-01-24 |