Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9810994 | Systems and methods for high-throughput and small-footprint scanning exposure for lithography | Burn Jeng Lin, Shy-Jay Lin, Wen-Chuan Wang | 2017-11-07 |
| 9678434 | Grid refinement method | Wen-Chuan Wang, Burn Jeng Lin, Pei-Yi Liu, Shy-Jay Lin | 2017-06-13 |
| 9538628 | Method for EUV power improvement with fuel droplet trajectory stabilization | Tsiao-Chen Wu | 2017-01-03 |