Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9847302 | Wafer surface conditioning for stability in fab environment | Fang-Wei Lin | 2017-12-19 |
| 9538628 | Method for EUV power improvement with fuel droplet trajectory stabilization | Jaw-Jung Shin | 2017-01-03 |