Issued Patents 2017
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9823574 | Lithography alignment marks | Ching-Huang Chen, Hung-Chang Hsieh, Ya Hui Chang, Spencer B. T. Lin | 2017-11-21 |
| 9805154 | Method of lithography process with inserting scattering bars | Irene Ho, Ai-Jen Hung, Hung-Chang Hsieh, Ya Hui Chang | 2017-10-31 |
| 9673328 | Structure and method for providing line end extensions for fin-type active regions | Shao-Ming Yu, Chang-Yun Chang, Chih-Hao Chang, Hsin-Chih Chen, Kai-Tai Chang +2 more | 2017-06-06 |
| 9612526 | Photomask and method for fabricating integrated circuit | Chun Lin, Yi-Jie Chen, Feng-Yuan Chiu, Ying-Chou Cheng, Ya Hui Chang +2 more | 2017-04-04 |
| 9595440 | Method of using a vaporizing spray system to perform a trimming process | Ching-Yu Chang, Ming-Feng Shieh | 2017-03-14 |