Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9805154 | Method of lithography process with inserting scattering bars | Irene Ho, Hung-Chang Hsieh, Kuei-Liang Lu, Ya Hui Chang | 2017-10-31 |
| 9733577 | Intra-field process control for lithography | Chen-Yen Huang, Shin-Rung Lu, Yen-Di Tsen | 2017-08-15 |
| 9588446 | Calibration apparatus and an adjustment method for a lithography apparatus | Chen-Yen Huang, Shin-Rung Lu, Yen-Di Tsen | 2017-03-07 |