Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9733577 | Intra-field process control for lithography | Ai-Jen Hung, Chen-Yen Huang, Yen-Di Tsen | 2017-08-15 |
| 9646896 | Lithographic overlay sampling | Yi-Ping Hsieh, Yung-Yao Lee, Ying-Ying Wang | 2017-05-09 |
| 9588446 | Calibration apparatus and an adjustment method for a lithography apparatus | Chen-Yen Huang, Ai-Jen Hung, Yen-Di Tsen | 2017-03-07 |