Issued Patents 2017
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9772561 | Semiconductor manufacturing method and tool | Yung-Yao Lee, Heng-Hsin Liu, Ying-Ying Wang | 2017-09-26 |
| 9766559 | Edge-dominant alignment method in exposure scanner system | Yung-Yao Lee, Ying-Ying Wang, Heng-Hsin Liu | 2017-09-19 |
| 9646896 | Lithographic overlay sampling | Yung-Yao Lee, Ying-Ying Wang, Shin-Rung Lu | 2017-05-09 |
| 9646902 | Paired edge alignment | Lee Yung-Yao, Ying-Ying Wang | 2017-05-09 |