Issued Patents 2017
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9772561 | Semiconductor manufacturing method and tool | Yung-Yao Lee, Heng-Hsin Liu, Yi-Ping Hsieh | 2017-09-26 |
| 9766559 | Edge-dominant alignment method in exposure scanner system | Yung-Yao Lee, Yi-Ping Hsieh, Heng-Hsin Liu | 2017-09-19 |
| 9659128 | Semiconductor overlay production system and method | Po-Chang Huang, Shellin Liu, Kuan-Chi Chen | 2017-05-23 |
| 9646896 | Lithographic overlay sampling | Yi-Ping Hsieh, Yung-Yao Lee, Shin-Rung Lu | 2017-05-09 |
| 9646902 | Paired edge alignment | Lee Yung-Yao, Yi-Ping Hsieh | 2017-05-09 |
| 9563946 | Overlay metrology method and overlay control method and system | Yung-Yao Lee, Shang-Wern Chang, Heng-Hsin Liu | 2017-02-07 |