Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9814097 | Baking apparatus for priming substrate | Chien-Hung Wang, Ren-Jyh Leu, Heng-Hsin Liu | 2017-11-07 |
| 9563946 | Overlay metrology method and overlay control method and system | Yung-Yao Lee, Ying-Ying Wang, Heng-Hsin Liu | 2017-02-07 |