Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9733577 | Intra-field process control for lithography | Ai-Jen Hung, Chen-Yen Huang, Shin-Rung Lu | 2017-08-15 |
| 9588446 | Calibration apparatus and an adjustment method for a lithography apparatus | Chen-Yen Huang, Ai-Jen Hung, Shin-Rung Lu | 2017-03-07 |