Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9773671 | Material composition and process for mitigating assist feature pattern transfer | Meng CHEN, Chen-Hau Wu, Kuei-Shun Chen, Yu-Chin Huang, Li-Hsiang Lai +2 more | 2017-09-26 |