Issued Patents 2017
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9793268 | Method and structure for gap filling improvement | Ying-Hao Su, Yu-Chung Su, Yu-Lun Liu, Chi-Kang Chang, Kuei-Shun Chen | 2017-10-17 |
| 9766545 | Methods for small trench patterning using chemical amplified photoresist compositions | Ya Hui Chang | 2017-09-19 |
| 9748107 | Method for removing semiconductor fins using alternating masks | Tzu-Chun Lo, Min Cheng, Hsiao-Wei Su, Jeng-Shiun Ho, Ching-Che Tsai +3 more | 2017-08-29 |
| 9711420 | Inline focus monitoring | Yuan-Yen Lo, Ming-Jhih Kuo | 2017-07-18 |
| 9607835 | Semiconductor device with biased feature | Min-Chang Liang, Mu-Chi Chiang, Kuei-Shun Chen | 2017-03-28 |