Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9793268 | Method and structure for gap filling improvement | Yu-Chung Su, Yu-Lun Liu, Chi-Kang Chang, Chia-Chu Liu, Kuei-Shun Chen | 2017-10-17 |
| 9697325 | System and method for optimization of an imaged pattern of a semiconductor device | Shih-Ming Chang, Ming-Yo Chung, Tzu-Chun Lo | 2017-07-04 |
| 9543161 | Method of planarizating film | Yu-Lun Liu, Chi-Kang Chang, Shih-Chi Fu, Kuei-Shun Chen, Chloe Hsu | 2017-01-10 |