Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9786569 | Overlay measurement and compensation in semiconductor fabrication | Shu-Hong Lin, Ya Hui Chang, Chih-Jung Chiang, Chang-Yi Tsai, Tsung-Lin Yang +1 more | 2017-10-10 |
| 9703918 | Two-dimensional process window improvement | Chi-Yuan Sun, Ya Hui Chang, Hung-Chang Hsieh | 2017-07-11 |