Issued Patents 2017
Showing 26–33 of 33 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9601346 | Spacer-damage-free etching | Tsung-Min Huang, Yung-Hsu Wu | 2017-03-21 |
| 9589890 | Method for interconnect scheme | Hsin-Chieh Yao, Carlos H. Diaz, Cheng-Hsiung Tsai, Chien-Hua Huang, Hsi-Wen Tien +3 more | 2017-03-07 |
| 9576814 | Method of spacer patterning to form a target integrated circuit pattern | Chieh-Han Wu, Cheng-Hsiung Tsai, Ming-Feng Shieh, Ru-Gun Liu, Shau-Lin Shue +1 more | 2017-02-21 |
| 9576893 | Semiconductor structure and semiconductor fabricating process for the same | Tsung-Min Huang | 2017-02-21 |
| 9576851 | Interconnect structure and methods of making same | Tsung-Min Huang, Tsung-Jung Tsai | 2017-02-21 |
| 9570305 | Self-aligned double patterning | Yu-Sheng Chang, Tien-I Bao | 2017-02-14 |
| 9564397 | Interconnect structure and method of forming the same | Cheng-Hsiung Tsai, Hai-Ching Chen, Shau-Lin Shue, Tien-I Bao | 2017-02-07 |
| 9558927 | Wet cleaning method for cleaning small pitch features | Chien-Hua Huang, Tsung-Min Huang | 2017-01-31 |