Issued Patents 2017
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9818633 | Equipment front end module for transferring wafers and method of transferring wafers | Thorsten Lill, Vahid Vahedi, Candi Kristoffersen, Andrew D. Bailey, III, Rangesh Raghavan +1 more | 2017-11-14 |
| 9595452 | Residue free oxide etch | Chih-Hsun Hsu, Thorsten Lill | 2017-03-14 |
| 9589853 | Method of planarizing an upper surface of a semiconductor substrate in a plasma etch chamber | Monica Titus, Gowri Kamarthy, Harmeet Singh, Yoshie Kimura, Baosuo Zhou +2 more | 2017-03-07 |
| 9570320 | Method to etch copper barrier film | Ji Zhu, Shuogang Huang, Baosuo Zhou, John Hoang, Prithu Sharma +1 more | 2017-02-14 |
| 9533332 | Methods for in-situ chamber clean utilized in an etching processing chamber | Noel Sun, Nicolas Gani, Chung Liu, Radhika Mani | 2017-01-03 |