Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9533332 | Methods for in-situ chamber clean utilized in an etching processing chamber | Noel Sun, Meihua Shen, Nicolas Gani, Radhika Mani | 2017-01-03 |
CL
Chung Liu
Overall (2017): #462,220 of 506,227Top 95%
1
Patents 2017