Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9633846 | Internal plasma grid applications for semiconductor fabrication | Alex Paterson, Do-Young Kim, Gowri Kamarthy, Helene Del Puppo, Jen-Kan Yu +5 more | 2017-04-25 |
| 9533332 | Methods for in-situ chamber clean utilized in an etching processing chamber | Noel Sun, Meihua Shen, Nicolas Gani, Chung Liu | 2017-01-03 |