CH

Chih-Hsun Hsu

Lam Research: 1 patents #161 of 396Top 45%
Overall (2017): #464,684 of 506,227Top 95%
1
Patents 2017

Issued Patents 2017

Patent #TitleCo-InventorsDate
9595452 Residue free oxide etch Meihua Shen, Thorsten Lill 2017-03-14