Issued Patents 2017
Showing 1–17 of 17 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9850568 | Plasma erosion resistant rare-earth oxide based thin film coatings | Biraja P. Kanungo, Vahid Firouzdor, Tom K. Cho | 2017-12-26 |
| 9850591 | High purity aluminum top coat on substrate | Sumanth Banda | 2017-12-26 |
| 9850573 | Non-line of sight deposition of erbium based plasma resistant ceramic coating | — | 2017-12-26 |
| 9850161 | Fluoride glazes from fluorine ion treatment | Chengtsin Lee | 2017-12-26 |
| 9812341 | Rare-earth oxide based coatings based on ion assisted deposition | Biraja P. Kanungo, Vahid Firouzdor, Ying Zhang | 2017-11-07 |
| 9797037 | Ion beam sputtering with ion assisted deposition for coatings on chamber components | Vahid Firouzdor, Biraja P. Kanungo, Tom K. Cho, Vedapuram S. Achutharaman, Ying Zhang | 2017-10-24 |
| 9725799 | Ion beam sputtering with ion assisted deposition for coatings on chamber components | Vahid Firouzdor, Biraja P. Kanungo, Tom K. Cho, Vedapuram S. Achutharaman, Ying Zhang | 2017-08-08 |
| 9708713 | Aerosol deposition coating for semiconductor chamber components | Biraja P. Kanungo, Tom K. Cho, Ying Zhang | 2017-07-18 |
| 9711334 | Ion assisted deposition for rare-earth oxide based thin film coatings on process rings | Biraja P. Kanungo, Vahid Firouzdor, Ying Zhang | 2017-07-18 |
| 9687953 | Chamber components with polished internal apertures | Vahid Firouzdor, David Koonce, Biraja P. Kanungo | 2017-06-27 |
| 9663870 | High purity metallic top coat for semiconductor manufacturing components | Vahid Firouzdor | 2017-05-30 |
| 9624593 | Anodization architecture for electro-plate adhesion | Biraja P. Kanungo | 2017-04-18 |
| 9617188 | Rare-earth oxide based coating | Biraja P. Kanungo | 2017-04-11 |
| 9610591 | Showerhead having a detachable gas distribution plate | Dmitry Lubomirsky, Vladimir Knyazik, Hamid Noorbakhsh, Jason C. Della Rosa, Zheng John Ye +1 more | 2017-04-04 |
| 9604249 | Innovative top-coat approach for advanced device on-wafer particle performance | Biraja P. Kanungo, Dmitry Lubomirsky, Vahid Fioruzdor | 2017-03-28 |
| 9597734 | Electrostatic chuck and showerhead with enhanced thermal properties and methods of making thereof | Sumanth Banda, Ren-Guan Duan | 2017-03-21 |
| 9583369 | Ion assisted deposition for rare-earth oxide based coatings on lids and nozzles | Biraja P. Kanungo, Vahid Firouzdor, Ying Zhang | 2017-02-28 |