| 9829799 |
Lithographic apparatus and device manufacturing method |
Aleksey Yurievich Kolesnychenko, Johannes Jacobus Matheus Baselmans, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Jeroen Johannes Sophia Maria Mertens +5 more |
2017-11-28 |
| 9804509 |
Lithographic apparatus and device manufacturing method |
Timotheus Franciscus Sengers, Sjoerd Nicolaas Lambertus Donders, Arjen Boogaard |
2017-10-31 |
| 9798247 |
Lithographic apparatus and device manufacturing method involving a liquid confinement structure |
Jacobus Johannus Leonardus Hendricus Verspay, Marco Koert Stavenga |
2017-10-24 |
| 9785061 |
Lithographic apparatus and in-line cleaning apparatus |
Roelof Frederik De Graaf, Bauke Jansen, Hubertus Leonardus Franciscus Heusschen |
2017-10-10 |
| 9772565 |
Immersion liquid, exposure apparatus, and exposure process |
Marco Koert Stavenga, Jacobus Johannus Leonardus Hendricus Verspay, Franciscus Johannes Joseph Janssen, Anthonie Kuijper |
2017-09-26 |
| 9753383 |
Radiation source and lithographic apparatus |
Michel Riepen, Dzmitry Labetski, Wilbert Jan Mestrom, Wim Ronald Kampinga, Jan Okke Nieuwenkamp +12 more |
2017-09-05 |
| 9703210 |
Lithographic apparatus and device manufacturing method |
Johannes Jacobus Matheus Baselmans, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Jeroen Johannes Sophia Maria Mertens, Johannes Catharinus Hubertus Mulkens +4 more |
2017-07-11 |
| 9645507 |
Lithographic apparatus and device manufacturing method |
Jacobus Johannus Leonardus Hendricus Verspay, Marco Koert Stavenga |
2017-05-09 |
| 9599908 |
Lithographic apparatus and contamination removal or prevention method |
Anthonius Martinus Cornelis Petrus De Jong, Martinus Hendrikus Antonius Leenders, Antonius Johannus Van Der Net, Peter Franciscus Wanten, Jacques Cor Johan Van Der Donck +4 more |
2017-03-21 |
| 9594308 |
Lithographic apparatus and device manufacturing method |
Timotheus Franciscus Sengers, Sjoerd Nicolaas Lambertus Donders, Arjen Boogaard |
2017-03-14 |
| 9588442 |
Lithographic apparatus and device manufacturing method |
Christiaan Alexander Hoogendam, Antonius Theodorus Anna Maria Derksen, Sjoerd Nicolaas Lambertus Donders, Joeri Lof, Erik Roelof Loopstra +4 more |
2017-03-07 |
| 9581914 |
Lithographic apparatus and device manufacturing method |
Marcel Mathijs Theodore Marie Dierichs, Sjoerd Nicolaas Lambertus Donders, Johannes Henricus Wilhelmus Jacobs, Erik Roelof Loopstra, Jeroen Johannes Sophia Maria Mertens +4 more |
2017-02-28 |
| 9568840 |
Lithographic apparatus and device manufacturing method |
Aleksey Yurievich Kolesnychenko, Johannes Jacobus Matheus Baselmans, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Jeroen Johannes Sophia Maria Mertens +5 more |
2017-02-14 |