Issued Patents 2017
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9812319 | Method for forming film filled in trench without seam or void | Atsuki Fukazawa | 2017-11-07 |
| 9812320 | Method and apparatus for filling a gap | Viljami Pore, Werner Knaepen, Bert Jongbloed, Dieter Pierreux, Steven R. A. Van Aerde +2 more | 2017-11-07 |
| 9627221 | Continuous process incorporating atomic layer etching | Masaru Zaitsu, Atsuki Fukazawa | 2017-04-18 |
| 9576790 | Deposition of boron and carbon containing materials | Viljami Pore, Yosuke Kimura, Kunitoshi Namba, Wataru Adachi, Werner Knaepen +2 more | 2017-02-21 |
| 9564309 | Si precursors for deposition of SiN at low temperatures | Antti Niskanen, Shang Chen, Viljami Pore, Atsuki Fukazawa, Suvi Haukka | 2017-02-07 |
| 9564314 | Methods for forming doped silicon oxide thin films | Noboru Takamure, Atsuki Fukazawa, Antti Niskanen, Suvi Haukka, Ryu Nakano +1 more | 2017-02-07 |