Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9673092 | Film forming apparatus, and method of manufacturing semiconductor device | Noboru Takamure, Hiroki Arai | 2017-06-06 |
| 9663857 | Method for stabilizing reaction chamber pressure | Wataru Adachi | 2017-05-30 |
| 9564314 | Methods for forming doped silicon oxide thin films | Noboru Takamure, Atsuki Fukazawa, Hideaki Fukuda, Antti Niskanen, Suvi Haukka +1 more | 2017-02-07 |