Issued Patents 2017
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9824881 | Si precursors for deposition of SiN at low temperatures | Shang Chen, Viljami Pore | 2017-11-21 |
| 9803277 | Reaction chamber passivation and selective deposition of metallic films | Delphine Longrie, Han Wang, Qi Xie, Jan Willem Maes, Shang Chen +4 more | 2017-10-31 |
| 9679808 | Selective formation of metallic films on metallic surfaces | Suvi Haukka, Marko Tuominen | 2017-06-13 |
| 9576792 | Deposition of SiN | Shang Chen, Viljami Pore, Ryoko Yamada | 2017-02-21 |
| 9564314 | Methods for forming doped silicon oxide thin films | Noboru Takamure, Atsuki Fukazawa, Hideaki Fukuda, Suvi Haukka, Ryu Nakano +1 more | 2017-02-07 |
| 9564309 | Si precursors for deposition of SiN at low temperatures | Shang Chen, Viljami Pore, Atsuki Fukazawa, Hideaki Fukuda, Suvi Haukka | 2017-02-07 |
| 9535029 | Low-cost electrode chip variants and methods for multi analyte analysis and referencing based on cathodic electroluminescence | Sakari Kulmala, Aija Kulmala, Kari Loikas, Matti Pusa | 2017-01-03 |