Issued Patents 2017
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9824881 | Si precursors for deposition of SiN at low temperatures | Antti Niskanen, Viljami Pore | 2017-11-21 |
| 9803277 | Reaction chamber passivation and selective deposition of metallic films | Delphine Longrie, Antti Niskanen, Han Wang, Qi Xie, Jan Willem Maes +4 more | 2017-10-31 |
| 9805974 | Selective deposition of metallic films | Toshiharu Watarai, Takahiro Onuma, Dai Ishikawa, Kunitoshi Namba | 2017-10-31 |
| 9576792 | Deposition of SiN | Viljami Pore, Ryoko Yamada, Antti Niskanen | 2017-02-21 |
| 9564309 | Si precursors for deposition of SiN at low temperatures | Antti Niskanen, Viljami Pore, Atsuki Fukazawa, Hideaki Fukuda, Suvi Haukka | 2017-02-07 |