Issued Patents 2017
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9803277 | Reaction chamber passivation and selective deposition of metallic films | Delphine Longrie, Antti Niskanen, Han Wang, Qi Xie, Jan Willem Maes +4 more | 2017-10-31 |
| 9805974 | Selective deposition of metallic films | Shang Chen, Toshiharu Watarai, Takahiro Onuma, Dai Ishikawa | 2017-10-31 |
| 9607837 | Method for forming silicon oxide cap layer for solid state diffusion process | — | 2017-03-28 |
| 9576790 | Deposition of boron and carbon containing materials | Viljami Pore, Yosuke Kimura, Wataru Adachi, Hideaki Fukuda, Werner Knaepen +2 more | 2017-02-21 |
| 9564314 | Methods for forming doped silicon oxide thin films | Noboru Takamure, Atsuki Fukazawa, Hideaki Fukuda, Antti Niskanen, Suvi Haukka +1 more | 2017-02-07 |