Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9803277 | Reaction chamber passivation and selective deposition of metallic films | Delphine Longrie, Antti Niskanen, Han Wang, Qi Xie, Jan Willem Maes +4 more | 2017-10-31 |
| 9805974 | Selective deposition of metallic films | Shang Chen, Toshiharu Watarai, Takahiro Onuma, Kunitoshi Namba | 2017-10-31 |
| 9754779 | Method for forming silicon nitride film selectively on sidewalls or flat surfaces of trenches | Atsuki Fukazawa | 2017-09-05 |