Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9673092 | Film forming apparatus, and method of manufacturing semiconductor device | Ryu Nakano, Hiroki Arai | 2017-06-06 |
| 9564314 | Methods for forming doped silicon oxide thin films | Atsuki Fukazawa, Hideaki Fukuda, Antti Niskanen, Suvi Haukka, Ryu Nakano +1 more | 2017-02-07 |
| 9556516 | Method for forming Ti-containing film by PEALD using TDMAT or TDEAT | Tatsuhiro Okabe | 2017-01-31 |