Issued Patents 2017
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9818601 | Substrate processing apparatus and method of processing substrate | Masaki Tokunaga, Atsuki Fukazawa | 2017-11-14 |
| 9793135 | Method of cyclic dry etching using etchant film | Nobuyoshi Kobayashi, Akiko Kobayashi, Masaru Hori, Hiroki Kondo, Takayoshi Tsutsumi | 2017-10-17 |
| 9735024 | Method of atomic layer etching using functional group-containing fluorocarbon | — | 2017-08-15 |
| 9627221 | Continuous process incorporating atomic layer etching | Atsuki Fukazawa, Hideaki Fukuda | 2017-04-18 |