Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9793135 | Method of cyclic dry etching using etchant film | Masaru Zaitsu, Nobuyoshi Kobayashi, Masaru Hori, Hiroki Kondo, Takayoshi Tsutsumi | 2017-10-17 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9793135 | Method of cyclic dry etching using etchant film | Masaru Zaitsu, Nobuyoshi Kobayashi, Masaru Hori, Hiroki Kondo, Takayoshi Tsutsumi | 2017-10-17 |