Issued Patents 2017
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9852892 | Microwave supply apparatus, plasma processing apparatus, and plasma processing method | Hitoshi Itoh, Hirotaka Toyoda, Haruka Suzuki, Makoto Sekine | 2017-12-26 |
| 9793135 | Method of cyclic dry etching using etchant film | Masaru Zaitsu, Nobuyoshi Kobayashi, Akiko Kobayashi, Hiroki Kondo, Takayoshi Tsutsumi | 2017-10-17 |
| 9773667 | Apparatus and method for producing group III nitride semiconductor device and method for producing semiconductor wafer | Hiroki Kondo, Kenji Ishikawa, Osamu Oda | 2017-09-26 |
| 9713241 | Reactive-species supply device and surface treatment apparatus | Hiroyuki Kano, Tetsunori Kawasumi, Naofumi Yoshida, Akihiro Kawajiri, Toshimitsu Watanabe +1 more | 2017-07-18 |