HI

Hitoshi Itoh

TL Tokyo Electron Limited: 1 patents #266 of 744Top 40%
📍 Yamanashi, JP: #142 of 385 inventorsTop 40%
Overall (2017): #402,819 of 506,227Top 80%
1
Patents 2017

Issued Patents 2017

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
9852892 Microwave supply apparatus, plasma processing apparatus, and plasma processing method Masaru Hori, Hirotaka Toyoda, Haruka Suzuki, Makoto Sekine 2017-12-26