Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9852892 | Microwave supply apparatus, plasma processing apparatus, and plasma processing method | Hitoshi Itoh, Masaru Hori, Hirotaka Toyoda, Haruka Suzuki | 2017-12-26 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9852892 | Microwave supply apparatus, plasma processing apparatus, and plasma processing method | Hitoshi Itoh, Masaru Hori, Hirotaka Toyoda, Haruka Suzuki | 2017-12-26 |