HS

Haruka Suzuki

NU National University Corporation Nagoya University: 1 patents #4 of 68Top 6%
TL Tokyo Electron Limited: 1 patents #266 of 744Top 40%
Overall (2017): #406,851 of 506,227Top 85%
1
Patents 2017

Issued Patents 2017

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
9852892 Microwave supply apparatus, plasma processing apparatus, and plasma processing method Hitoshi Itoh, Masaru Hori, Hirotaka Toyoda, Makoto Sekine 2017-12-26