Issued Patents 2016
Showing 26–32 of 32 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9256123 | Method of making an extreme ultraviolet pellicle | Chih-Tsung Shih, Tien-Hsi Lee, Chia-Jen Chen, Shang-Chieh Chien, Shinn-Sheng Yu +1 more | 2016-02-09 |
| 9257282 | Method of semiconductor integrated circuit fabrication | Chih-Tsung Shih, Tsung-Min Huang, Chung-Ju Lee, Shinn-Sheng Yu, Jeng-Horng Chen | 2016-02-09 |
| 9256142 | Pellicle mounting system and method | Yeh Lee-Chih, Hsin-Chang Lee, Chia-Jen Chen, Ming-Jiun Yao | 2016-02-09 |
| 9252048 | Metal and via definition scheme | Yen-Cheng Lu, Chih-Tsung Shih, Shinn-Sheng Yu, Jeng-Horng Chen | 2016-02-02 |
| 9244341 | Photomask and method for forming the same | Hsin-Chang Lee, Chia-Jen Chen, Pei-Cheng Hsu | 2016-01-26 |
| 9244366 | Extreme ultraviolet lithography process and mask | Yen-Cheng Lu, Shinn-Sheng Yu, Jeng-Horng Chen | 2016-01-26 |
| 9229326 | Method for integrated circuit patterning | Yen-Cheng Lu, Shu-Hao Chang, Shinn-Sheng Yu, Jui-Ching Wu, Jeng-Horng Chen | 2016-01-05 |