Issued Patents 2016
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9520267 | Bias voltage frequency controlled angular ion distribution in plasma processing | Ludovic Godet, Prashanth Kothnur, Umesh M. Kelkar, Matthew D. Scotney-Castle | 2016-12-13 |
| 9502258 | Anisotropic gap etch | Ching-Mei Hsu, Zihui Li, Ludovic Godet, Anchuan Wang, Nitin K. Ingle | 2016-11-22 |
| 9502262 | Nanocrystalline diamond carbon film for 3D NAND hardmask application | Yongmei Chen, Christopher S. Ngai, Jingjing Liu, Chentsau Ying, Ludovic Godet | 2016-11-22 |
| 9412613 | Development of high etch selective hardmask material by ion implantation into amorphous carbon films | Pramit Manna, Abhijit Basu Mallick, Ludovic Godet, Yongmei Chen, Mukund Srinivasan +2 more | 2016-08-09 |
| 9382625 | Remote plasma source based cyclic CVD process for nanocrystalline diamond deposition | Jingjing Liu, Yongmei Chen, Ludovic Godet, Chentsau Ying, Shambhu N. Roy | 2016-07-05 |
| 9313321 | Screen unlocking method and device for mobile terminal | Liang Zeng, Lei Chen | 2016-04-12 |