Issued Patents 2016
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9523800 | Computation efficiency by iterative spatial harmonics order truncation | Andrei Veldman | 2016-12-20 |
| 9518916 | Compressive sensing for metrology | Stilian Ivanov Pandev, Alexander Kuznetsov, Gregory Brady, Andrei V. Shchegrov, Noam Sapiens | 2016-12-13 |
| 9494535 | Scatterometry-based imaging and critical dimension metrology | Abdurrahman Sezginer, Michael S. Bakeman | 2016-11-15 |
| 9310296 | Optimizing an optical parametric model for structural analysis using optical critical dimension (OCD) metrology | Thaddeus Gerard Dziura, Yung-Ho Alex Chuang, Bin-Ming Benjamin Tsai, Xuefeng Liu | 2016-04-12 |