Issued Patents 2016
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9494535 | Scatterometry-based imaging and critical dimension metrology | Abdurrahman Sezginer, John J. Hench | 2016-11-15 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9494535 | Scatterometry-based imaging and critical dimension metrology | Abdurrahman Sezginer, John J. Hench | 2016-11-15 |