Issued Patents 2016
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9443714 | Methods and apparatus for substrate edge cleaning | Song-Moon Suh, Todd Egan, Kalyanjit Ghosh, Leon Volfovski, Michael R. Rice +1 more | 2016-09-13 |
| 9299614 | Method and carrier for dicing a wafer | Brad Eaton, Aparna Iyer, Ajay Kumar | 2016-03-29 |
| 9245802 | Wafer dicing using femtosecond-based laser and plasma etch | Wei-Sheng Lei, Brad Eaton, Madhava Rao Yalamanchili, Saravjeet Singh, Ajay Kumar | 2016-01-26 |