Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9384998 | Technique to deposit sidewall passivation for high aspect ratio cylinder etch | Eric A. Hudson, Joseph Scott Briggs | 2016-07-05 |
| 9257274 | Gapfill of variable aspect ratio features with a composite PEALD and PECVD method | Hu Kang, Shankar Swaminathan, Jun Qian, Wanki Kim, Bart J. van Schravendijk +1 more | 2016-02-09 |
| 9230800 | Plasma activated conformal film deposition | Adrien LaVoie, Shankar Swaminathan, Hu Kang, Ramesh Chandrasekharan, Tom Dorsh +9 more | 2016-01-05 |