Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9384998 | Technique to deposit sidewall passivation for high aspect ratio cylinder etch | Eric A. Hudson, Dennis M. Hausmann | 2016-07-05 |
| 9378971 | Technique to deposit sidewall passivation for high aspect ratio cylinder etch | Eric A. Hudson | 2016-06-28 |