Issued Patents 2005
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6951765 | Method and apparatus for introduction of solid precursors and reactants into a supercritical fluid reactor | Sanjay Gopinath, Patrick A. Van Cleemput, Michelle T. Schulberg, Sasangan Ramanathan, Patrick Joyce | 2005-10-04 |
| 6867152 | Properties of a silica thin film produced by a rapid vapor deposition (RVD) process | Dennis M. Hausmann, Adrianne K. Tipton, Patrick A. Van Cleemput, Bunsen B. Nie, Teresa Pong | 2005-03-15 |
| 6848458 | Apparatus and methods for processing semiconductor substrates using supercritical fluids | Krishnan Shrinivasan, Souvik Banerjee, Karen A. Reinhardt, Sanjay Gopinath | 2005-02-01 |